A131 Nano-scale sputtering behavior in Focused Ion Beam Processing via Large-Scale Molecular Dynamics Simulation

Satake, Shin‐ichi; Inoue, N.; Taniguchi, Jun; Shibahara, Masahiko; Tsuchida, Tomoyuki; Omata, Yukiko

doi:10.1299/jsmeted.2006.17

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“…Molecular dynamics simulations were sometimes conducted to predict the surface states during and after FIB process (1) (2) . However, the physical effect of secondary emission on energy and mass transfer is seldom considered and there are few examples of analysis of the secondary electron emission.…”

Section: Introductionmentioning

confidence: 99%

Quantum Molecular Dynamics Study on Energy Transfer to the Secondary Electron in Surface Collision Process of an Ion

Shibahara

Satake

Taniguchi

2008

JTST

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In the present study the quantum molecular dynamics method was applied to an energy transfer problem to an electron during ionic surface collision process in order to elucidate how energy of ionic collision transfers to the emitted electrons. Effects of various physical parameters, such as the collision velocity and interaction strength between the observed electron and the classical particles on the energy transfer to the electron were investigated by the quantum molecular dynamics method when the potassium ion was collided with the surface so as to elucidate the energy path to the electron and the predominant factor of energy transfer to the electron. Effects of potential energy between the ion and the electron and that between the surface molecule and the electron on the electronic energy transfer were shown in the present paper. The energy transfer to the observed secondary electron through the potential energy term between the ion and the electron was much dependent on the ion collision energy although the energy increase to the observed secondary electron was not monotonous through the potential energy between the ion and surface molecules with the change of the ion collision energy.

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Section: Introductionmentioning

confidence: 99%