Aberration Correctors Developed Under the Triple C Project

The correction of electron lens aberrations

“…19. Tandem optical system in which the C c -corrector and the delta corrector are united (after Sawada et al [167]; courtesy of the authors and Elsevier). companies in electron optics, Bohumila Lencová's "Software for Particle Optics Calculations" (SPOC) and Eric Munro's "Munro's Electron Beam Software" (MEBS), extended their programme suites to cover the new requirements of aberration-corrected instruments, Lencová preferring exact ray tracing for higher order aberrations, while Munro used differential algebra (www.lencova.…”

“…This is the Triple C project (C s correction, C c correction, Carbon materials). Here too, the microscope was constructed by JEOL Several important modifications to the basic double-sextupole corrector have been introduced by JEOL [167]. Firstly, an asymmetric corrector was constructed, to reduce the effect of higher order parasitic aberrations.…”

“…Correction of the spherical aberration of a 200 kV TEM by means of a hexapole corrector.Optik 99,[167][168][169][170][171][172][173][174][175][176][177][178][179] M Haider, G. Braunshausen and E. Schwan (1995)…”

Advantage of Cc/Cs-corrected Imaging in 30 kV Transmission Electron Microscopy

“…The first machine, Triple C #1 equipped with a cold field emission gun (CFEG), delta-type Cs correctors and a low-voltage Quantum (Gatan), enabled us to observe and analyze defected structures of graphene edge at atomic resolution [1]. The second machine, Triple C #2 equipped with a CFEG, delta-type Cs corrector and Cc corrector, has been set up, and Cc and Cs of objective lens in the imaging system have been successfully compensated by using Cc-Cs tandem system [2,3]. Young's fringe test showed that the transferred information reached 0.14 nm after the Cc/Cscorrection at 30 kV, while it stayed 0.28 nm before Cc/Cs-correction [4].…”