Absolute length measurement method with sub-nanometer accuracy by combining regular crystalline lattice and laser interferometry

Aketagawa, Masato; Rerkkumsup, P.; Takada, Koji

doi:10.1299/jsmemecjo.2002.5.0_281

The Proceedings of the JSME Annual Meeting

2002

DOI: 10.1299/jsmemecjo.2002.5.0_281

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Absolute length measurement method with sub-nanometer accuracy by combining regular crystalline lattice and laser interferometry

Masato Aketagawa

P. Rerkkumsup

Koji Takada

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Absolute length measurement method with sub-nanometer accuracy by combining regular crystalline lattice and laser interferometry

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