Conference on Optoelectronic and Microelectronic Materials and Devices, 2004.
DOI: 10.1109/commad.2004.1577540
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Accuracy Limitations Introduced by Digital Projection Sources in Profilometric Optical Metrology Systems

Abstract: The accuracy of profilometric optical metrology systems utilising Digital Fringe Projection (DFP) is analysed. An analytical model to describe theoretical accuracy limitation is derived and given as a function of object distance from the projector, projector resolution, projection angle and also object gradient. Associated limitations of the model are also discussed and analysed. The validity of the new model is demonstrated through practical experimentation. Disciplines Physical Sciences and Mathematics Publi… Show more

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Cited by 4 publications
(4 citation statements)
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“…In error induced by the non-sinusoidal waveforms and devise an iterative compensation algorithm taking into account the non-linearity due to the whole system, rather than the DVP effect alone. In general though, accuracy depends on the projector characteristics as a whole, as discussed in [14]. It has been demonstrated [7] that these errors can be somewhat alleviated by using a larger number of fringe patterns, however for dynamic applications requiring fast reconstruction (such as FTP and 3-step or 4-step profilometry [15,16]) the non-sinusoidal phase error is considered as the dominant error source.…”
Section: Related Workmentioning
confidence: 99%
“…In error induced by the non-sinusoidal waveforms and devise an iterative compensation algorithm taking into account the non-linearity due to the whole system, rather than the DVP effect alone. In general though, accuracy depends on the projector characteristics as a whole, as discussed in [14]. It has been demonstrated [7] that these errors can be somewhat alleviated by using a larger number of fringe patterns, however for dynamic applications requiring fast reconstruction (such as FTP and 3-step or 4-step profilometry [15,16]) the non-sinusoidal phase error is considered as the dominant error source.…”
Section: Related Workmentioning
confidence: 99%
“…This enables the implementation of the evaluation of a point on the NURBS surface using a GPU. 1 Note that a edge-based method such as [14] could be used.…”
Section: Interpolation Of the Coefficents In The Volumementioning
confidence: 99%
“…Blurring has been identified as a significant limitation of digital projector profilometry [1]. In order to use deconvolution algorithm to improve the performance of a Structured Light System (SLS), a PSF model and well suited representations are needed.…”
Section: Introductionmentioning
confidence: 99%
“…Blurring was described as a significant limitation of digital projector profilometry [1] and our framework allows a significant improvement when working out of focus, a situation which occurs when performing depth measurement. Our algorithm iteratively performs a deconvolution and a segmentation of the patterns.…”
Section: Introductionmentioning
confidence: 99%