Addition of a single chemical functional group to a polymer surface with a mass‐separated low‐energy ion beam

Nowak, Paweł; McIntyre, N. S.; Hunter, D. H.; Bello, I.; Lau, W. M.

doi:10.1002/sia.740231304

Cited by 23 publications

(35 citation statements)

References 18 publications

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“…A small electron current from the filaments of a sputter ion gun was delivered to the target surface during ion exposure to compensate for ion beam induced charging. 11 Control exposures found negligible contributions to PS modification from the background gas and the neutralizing electron beam.…”

Section: Methodsmentioning

confidence: 97%

Chemical Modification of Polystyrene Surfaces by Low-Energy Polyatomic Ion Beams

1998

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The chemical modification of polystyrene surfaces by low-energy (10-100 eV) SF 5 + , C 3 F 5 + , and SO 3 + ions was studied by X-ray photoelectron spectroscopy and two-laser ion trap mass spectrometry. The mechanism of fluorination was found to be dissimilar for SF 5 + and C 3 F 5 + ions in this energy range at fluences of 10 14 -10 16 ions/cm 2 . SF 5 + was found to induce fluorination of the polymer surface by grafting reactive F atoms upon dissociation at impact. SF n fragments were not found to be grafted or implanted into the polymer. Sulfur was detected on the polymer surface only at incident energies above 50 eV and was found to be sulfidic in nature. In contrast, C 3 F 5 + ions induced grafting of both reactive F atoms and molecular C m F n fragments from the dissociation of the incident projectile. Larger proportions of highly fluorinated sites and thicker fluorocarbon layers were found for C 3 F 5 + at all energies and fluences. A variety of aliphatic and aromatic fluorine bonding environments were detected on both SF 5 + and C 3 F 5 + modified polystyrene surfaces.

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Section: Methodsmentioning

confidence: 97%

Chemical Modification of Polystyrene Surfaces by Low-Energy Polyatomic Ion Beams

1998

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“…A few studies have demonstrated that low energy ion beams can be used to selectively modify surfaces. 23,25,203,311,312 However, most stud-ies employ chemically nonspecific modifications to alter the adsorbate. [313][314][315] Chemically selective incorporation of functional groups into surfaces using reactive gaseous ions has been achieved.…”

Section: Surface Modification By Ionõsurface Reactionsmentioning

confidence: 99%

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Grill¹,

Shen²,

Evans³

et al. 2001

Review of Scientific Instruments

202

249

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Articles you may be interested inMeasuring the internal energies of species emitted from hypervelocity nanoprojectile impacts on surfaces using recalibrated benzylpyridinium probe ions High-energy ions and atoms sputtered and reflected from a magnetron source for deposition of magnetic thin films J. Vac. Sci. Technol. A 23, 671 (2005); 10. 1116/1.1943452 Surface induced dissociations of protonated ethanol monomer, dimer and trimer ions: Trimer break-down graph from the collision energy dependence of projectile fragmentation An overview of gaseous ion/surface collisions is presented, with special emphasis on the behavior of polyatomic projectile ions at hyperthermal collision energies ͑1-100 eV͒ and the instrumentation needed for such studies. The inelastic and reactive processes occurring during ion/surface collisions are described in terms of several archetypes, viz., elastic and quasielastic scattering, chemical sputtering leading to release of surface material, inelastic scattering leading to surface-induced dissociation ͑SID͒ of the projectile, ion/surface reactions, and soft landing. Parameters that are important in ion/surface interactions are discussed, including the interaction time, the conversion of translational to internal energy, the translational energies of the scattered ions, the effects of scattering angle, and the influence of the nature of the surface. Different types of tandem mass spectrometers, built specifically to study ion/surface collision phenomena, are discussed and the advantages and disadvantages of the individual designs are compared. The role of SID as a technique in bioanalytical mass spectrometry is illustrated and this inelastic collision experiment is compared and contrasted with gas-phase collision-induced dissociation, the standard method of tandem mass spectrometry. Special emphasis is placed on reactive scattering including the use of ion/surface reactions for surface chemical analysis and for surface chemical modification.

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“…Mass separated low energy polyatomic ion beams have several advantages for practical surface modification due to the highly surface-selective nature of the polyatomic-surface interaction, the unique collision dynamics, and the ability to transfer intact chemical functionality to the surface. [1][2][3] Low and medium energy atomic ions have been used in microelectronics manufacturing for repairing photolithography masks, doping, producing interconnect features, and submicron lithography. 4,5 Atomic ions have also been used to grow hard inorganic films 6 and selectively modify polymer films.…”

Section: A Polyatomic Ion-surface Modificationmentioning

confidence: 99%

Effect of polyatomic ion structure on thin-film growth: Experiments and molecular dynamics simulations

Wijesundara

Yuan

et al. 2000

Journal of Applied Physics

111

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The experiments described here examine 25-100 eV CF 3 ϩ and C 3 F 5 ϩ ion modification of a polystyrene ͑PS͒ surface, as analyzed by x-ray photoelectron spectroscopy. The molecular dynamics computer simulations probe the structurally and chemically similar reactions of 20-100 eV CH 3 ϩ and C 3 H 5 ϩ with PS. CF 3 ϩ and C 3 F 5 ϩ each form a distribution of different fluorocarbon ͑FC͒ functional groups on PS in amounts dependent upon the incident ion energy, structure, and fluence. Both ions deposit mostly intact upon the surface at 25 eV, although they also undergo some crosslinking upon deposition. Fragmentation of the two ions increases as the ion energies are increased to 50 eV. Both ions show increases in total fluorine and fluorinated carbon content when changing the ion energy from 25 to 50 eV. The simulations predict that CH 3 ϩ and C 3 H 5 ϩ behave in a similar fashion to their FC analogs, remaining mostly intact and either embedding or scattering from the surface without reacting at 20 eV. At 50 and 100 eV, the simulations predict fragmentation most or all of the time. The simulations also show that the chemical products of the collisions depend significantly on the structure of the incident isomer. The simulations further illustrate how the maximum penetration depth of ion fragments depends on ionic structure, incident energy, and the identity of the penetrating fragment. These ion-surface results are discussed in terms of their possible role in plasmas.

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Addition of a single chemical functional group to a polymer surface with a mass‐separated low‐energy ion beam

Cited by 23 publications

References 18 publications

Chemical Modification of Polystyrene Surfaces by Low-Energy Polyatomic Ion Beams

Chemical Modification of Polystyrene Surfaces by Low-Energy Polyatomic Ion Beams

Collisions of ions with surfaces at chemically relevant energies: Instrumentation and phenomena

Effect of polyatomic ion structure on thin-film growth: Experiments and molecular dynamics simulations

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