Adopting combined feed forward solution in HVM fab to improve on product overlay

Zeng, Senmao; Xue, Huadan; Zhang, Tianyu; Lu, Nanxi; Wu, Dean; Feng, Yaobin; Wang, Jun; Xuan, Pandeng; Zhu, Ningqi; Li, Cynthia; Xiao, Eric; Zhu, Jianguo; Zhang, Mi; Pei, Jincheng; Huang, Kevin

doi:10.1117/12.2617698

Metrology, Inspection, and Process Control XXXVI 2022

DOI: 10.1117/12.2617698

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Adopting combined feed forward solution in HVM fab to improve on product overlay

Senmao Zeng¹,

Huadan Xue²,

Tianyu Zhang³

et al.

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On-product Overlay Improvement for a Back-End-of-Line Immersion Layer

Liu

Zhang

et al. 2022

2022 International Workshop on Advanced Patterning Solutions (IWAPS)

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Adopting combined feed forward solution in HVM fab to improve on product overlay

Cited by 3 publications

References 0 publications

On-product Overlay Improvement for a Back-End-of-Line Immersion Layer

On-product Overlay Improvement for a Back-End-of-Line Immersion Layer

A Novel Feedforward and Feedback Method for Overlay Control

Investigation of Multiple Feedforward Modes for On Product Overlay Control

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