2015
DOI: 10.1016/j.micron.2014.08.008
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Advanced fabrication process for combined atomic force-scanning electrochemical microscopy (AFM-SECM) probes

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Cited by 35 publications
(25 citation statements)
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“…Combination of AFM with SECM is by nature very powerful, taking advantage of micro/nanofabrication techniques to tune the electrode shape and size [18][19][20][21]. By comparison, the simplicity of fabrication of SICM probes makes them very successful for laboratory experiment at the interface with living materials [14,22].…”
Section: Introductionmentioning
confidence: 99%
“…Combination of AFM with SECM is by nature very powerful, taking advantage of micro/nanofabrication techniques to tune the electrode shape and size [18][19][20][21]. By comparison, the simplicity of fabrication of SICM probes makes them very successful for laboratory experiment at the interface with living materials [14,22].…”
Section: Introductionmentioning
confidence: 99%
“…Single carbon nanotubes were attached to an AFM cantilever and used as electrodes 58 . Various fabrications for commercial pyramidal AFM have been developed through metal deposition, and finer‐sized tips can be obtained through focused ion beam (FIB) milling 59 …”
Section: Nanoelectrodementioning
confidence: 99%
“…Compared with SICM, the combination with AFM not only creates excellent spatial resolution, it also provides synchronous nanoscale measurements of topographical changes and mechanical information on the specimen [73]. Several methods have been reported for fabricating AFM-SECM probes, including etching and insulating conductive microwires (Au or Pt) [74], plasma-enhanced chemical vapor deposition [75], and FIB milling [76]. The high spatial and topographical resolution of the AFM analyses coupled with the amperometric information obtained from an SECM section make AFM-SECM a reliable tool for studying complex live biological samples such as DNA chains and protein distributions [77].…”
Section: Instrumentation and Operating Modesmentioning
confidence: 99%