Advanced Ferroelectric Modeling for BEOL Negative Capacitance Nanoelectromechanical Switches

Finnan, Collin; Tatum, Lars; Liu, Tsu-Jae King

doi:10.1109/sispad62626.2024.10733007

2024 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) 2024

DOI: 10.1109/sispad62626.2024.10733007

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Advanced Ferroelectric Modeling for BEOL Negative Capacitance Nanoelectromechanical Switches

Collin Finnan,

Lars Tatum,

Tsu-Jae King Liu

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Advanced Ferroelectric Modeling for BEOL Negative Capacitance Nanoelectromechanical Switches

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References 12 publications

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