Semiconductor Processing 1984
DOI: 10.1520/stp32686s
|View full text |Cite
|
Sign up to set email alerts
|

Advanced Test Reactor Ntd Silicon Production Hardware

Abstract: The Advanced Test Reactor (ATR) is a 250-MWth materials testing and nuclear research facility operated for the United States Department of Energy (DOE) by EG&G Idaho, Inc. The unique capabilities of the ATR can be readily adapted via hardware to produce large quantities of large-diameter (20 cm plus) doped silicon crystals. Conservative estimates place the production eapability in excess of 15 metric tons per year. The proposed hardware is based upon a closed-loop, hydraulic-shuttle-tube system.

Help me understand this report

This publication either has no citations yet, or we are still processing them

Set email alert for when this publication receives citations?

See others like this or search for similar articles