Advances In Analytical Auger Electron Spectroscopy

Abstract

Fundamental principles and experimental procedures for fully utilizing the power of Auger analysis are discussed. Topics include: quantitative analysis, high resolution imaging, depth profiling, and noise reduction. These studies reveal several improvements that might be expected in the immediate future and how they might be achieved. Some knowledge of Auger spectroscopy is assumed, but references on theory, principles, instrumentation, and applications are cited.