Advances in precision micro/nano-electroforming: a state-of-the-art review

Abstract

Micro/nano-electroforming has received considerable interest from various industry sectors as an advanced micro-manufacturing technique that offers high dimensional precision and replication accuracy. When tight feature tolerances and miniaturized geometries are required, electroforming provides unique advantages and cost-effective characteristics for fabrication. This paper firstly reviews the historical development of micro-electroforming, particularly within the past two decades. The fundamentals of electroforming and relevant applications are firstly discussed, and the common requirements are then proposed. Based on these requirements, we have focused on the processes of micro-electroforming from the ultraviolet lithography, electroplating, and moulding process to electroforming process characterization and optimization, bath compositions, agitation, and some hybrid processes. Progress from electrochemical micro/nano-manufacturing processes, such as 3D printing by electrodeposition and electrochemical wet stamping, is also included. The eventual nanocomposite electroforming is highlighted from the perspectives of the formation mechanism, deposition properties and relevant applications. Finally, a conclusion and future perspectives are presented. This review will demonstrate how the micro/nano-electroforming process can be further developed to meet the requirements of new product development from precision optics, micro/nano-moulding, high-performance coatings and future micro/nano-manufacturing.

Influence of Bath Hydrodynamics on the Micromechanical Properties of Electrodeposited Nickel-Cobalt Alloys

“…The use of electrochemical deposition (ECD) technique in combination with silicon microtechnology opened new realms of applications by expanding the choice of materials for microfabrication by integrating the use of metals, alloys, and composites [ 1 , 2 , 3 , 4 ]. Using the simple UV-LIGA method, the generation of high aspect ratio microstructures (HARMS) is made possible for, e.g., fabrication of microtools such as micropunches, electrochemical machining (ECM) microtools, micromolds, etc.…”

Current and Future Trends for Polymer Micro/Nanoprocessing in Industrial Applications

“…Thus, high‐precision technologies have attracted considerable attention in recent years. [ 1,2 ] For example, micro/nanoprocessing of polymers, which pertains to the manufacturing and application of materials to realize the design of industrial products at the micro‐ or nanoscale, is an emerging industry of the 21st century that is considered to hold almost as much potential as the IT and biotechnology fields. [ 3,4 ] In particular, the scale of processing has shifted from the millimeter level (10 −3 m) to the micrometer (10 −6 m) and nanoscale (10 −9 m) levels.…”

Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size

“…Electrochemical deposition (ECD) is a typical additive micromachining technology in which the product is formed layer by layer, and ECD technology based on an aqueous solution generally has the advantages of a wide range of application materials, low operating temperature, coordinated control of microstructure, morphology, and properties, and flexible application form, among others [ 12 , 13 ]. Theoretically, when the metal atoms or grains formed by the reduction reaction are stacked in a controlled manner as designed, metal-based structures and parts of any shape can be fabricated by ECD [ 14 ].…”