AFM cantilever with integrated piezoelectric thin film for micro-actuation

Abstract

This work presents micro-actuation of atomic force microscopy (AFM) cantilevers using piezoelectric Zinc Oxide (ZnO) thin film. In tapping mode AFM, the cantilever is driven near its resonant frequency by an external oscillator such as piezotube or stack of piezoelectric material. Use of integrated piezoelectric thin film for AFM cantilever eliminates the problems like inaccurate tuning and unwanted vibration modes. In this work, silicon AFM cantilevers were sputter deposited with ZnO piezoelectric film along with top and bottom metallic electrodes. The self-excitation of the ZnO coated AFM cantilever was studied using Laser Doppler Vibrometer (LDV). At its resonant frequency (227.11 kHz), the cantilever displacement varies linearly with applied excitation voltage. We observed an increase in the actuation response (131nm/V) due to improved quality of ZnO films deposited at 200 °C.

Tailoring Thin‐Film Piezoelectrics for Crash Sensing

“…[24] Recently, we have successfully demonstrated piezoelectric ZnO thin films in wideranging applications, such as a gas flowrate sensor, [25] an impact sensor for nondestructive material dis crimination, [26] and microactuation. [27,28] In this article, we have customtailored piezoelectric properties of nanostructured ZnO thin films for crash sensing studies.In accordance with recent reports, vehicular accidents are lifethreatening and result in fatal casualties across the devel oping and developed nations. [29] Major possible reasons for road accidents are an increase in traffic volume, negligence due to distraction by mobile phones, [30] and drunk driving.…”

“…[24] Recently, we have successfully demonstrated piezoelectric ZnO thin films in wideranging applications, such as a gas flowrate sensor, [25] an impact sensor for nondestructive material dis crimination, [26] and microactuation. [27,28] In this article, we have customtailored piezoelectric properties of nanostructured ZnO thin films for crash sensing studies.…”