AFM Integrated with SEM and FIB: A Synergistic Union

Abstract

Scanning electron microscopy (SEM) and ion beam milling techniques are mature nanoscale measurement technologies, whereas atomic force microscopy (AFM) is a developing technology generating intense interest in the scientific community for basic research and development. These techniques have generally existed in separate worlds. This article discusses a capability that marries these technologies through an instrument recently introduced by Nanonics, the 3TB4000.