Ag y :TiN x thin films for dry biopotential electrodes: the effect of composition and structural changes on the electrical and mechanical behaviours

The influence of nitrogen and oxygen additions on the thermal characteristics of aluminium-based thin films

“…In fact, the values of the thermal diffusivity compare well with those presented in previous works [25,34,55,56]. These results are also a good indication of a reduced localized heating, which is a major requirement if one intends to use this thin film system in small sensor devices or in electrodes for biosignal acquisition, such as those for electroencephalography (EEG) and electromyography (EMG), as it is the case of the main research area in the group [5,34,57] [56], being aware that the thermal diffusivity/conductivity can change quite strongly, depending on the crystalline quality and on the oxygen content of each film [53]. Regarding the effusivity ratio, which is a crucial parameter in controlling the heat propagation between different media, the obtained results are again rather promising.…”