Air microjet system for non-contact force application and the actuation of micro-structures

Abstract

We demonstrate a non-contact technique to apply calibrated and localized forces in the micro-Newton to milli-Newton range using an air microjet. An electromagnetically actuated diaphragm controlled by a signal generator is used to generate the air microjet. With a nozzle diameter of 150 μm, the microjet diameter was maintained to a maximum of 1 mm at a distance of 5 mm from the nozzle. The force generated by the microjet was measured using a commercial force sensor to determine the velocity profile of the jet. Axial flow velocities of up to 25 m s−1 were obtained at distances as long as 6 mm. The microjet exerted a force up to 1 μN on a poly dimethyl siloxane (PDMS) micropillar (50 μm in diameter, 157 μm in height) and 415 μN on a PDMS membrane (3 mm in diameter, 28 μm thick). We also demonstrate that from a distance of 6 mm our microjet can exert a peak pressure of 187 Pa with a total force of about 84 μN on a flat surface with 8 V operating voltage. Out of the cleanroom fabrication and robust design make this system cost effective and durable.