All-optical high-speed signal processing with silicon–organic hybrid slot waveguides

Koos, C.; Vorreau, P.; Vallaitis, T.; Dumon, Pieter; Bogaerts, Wim; Baets, Roel; Esembeson, Bweh; Biaggio, Ivan; Michinobu, Tsuyoshi; Diederich, François; Freude, W.; Leuthold, Juerg

doi:10.1038/nphoton.2009.25

Cited by 854 publications

(588 citation statements)

References 28 publications

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“…Due to the discontinuity in the electric field at the high index contrast interfaces, such a structure supports an optical mode which can confine and guide light along the nanometer-size region of low index material, as shown in Figure 1. This unique property of slot waveguides has been exploited in many areas such as sensing (Barrios et al, 2007;Carlborg et al, 2010), non-linear optics (Muellner et al, 2009;Martínez et al, 2010), electro-optic modulation (Baehr-Jones et al, 2008;Chen et al, 2009;Koos et al, 2009), light sources (Guo et al, 2012;Tengattini et al, 2013), etc. However, a major limitation of slot waveguides is their high propagation loss.…”

Section: Introductionmentioning

confidence: 99%

Low-Loss Slot Waveguides with Silicon (111) Surfaces Realized Using Anisotropic Wet Etching

et al. 2016

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We demonstrate low-loss slot waveguides on silicon-on-insulator platform. Waveguides oriented along the (11-2) direction on the Si (110) plane were first fabricated by a standard e-beam lithography and dry etching process. A tetramethylammonium hydroxide-based anisotropic wet etching technique was then used to remove any residual side wall roughness. Using this fabrication technique, propagation loss as low as 3.7 dB/cm was realized in silicon slot waveguide for wavelengths near 1550 nm. We also realized low propagation loss of 1 dB/cm for silicon strip waveguides.

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Section: Introductionmentioning

confidence: 99%

Low-Loss Slot Waveguides with Silicon (111) Surfaces Realized Using Anisotropic Wet Etching

et al. 2016

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“…A lot of research has been done on other materials which have less or no two photon absorption such as chalcogenide glasses [6]. Recently, SOI hybrid slot waveguides have been demonstrated by using a polymer cladding as the nonlinear material [7]. In this article deposited amorphous silicon (a-Si) is proposed as a core nonlinear material.…”

Section: Introductionmentioning

confidence: 99%

Self phase modulation in highly nonlinear hydrogenated amorphous silicon

Kuyken

Clemmen

Selvaraja

et al. 2010

2010 IEEE Photinic Society's 23rd Annual Meeting

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Abstract-We study self phase modulation in submicron amorphous silicon-on-insulator waveguides. We extract both the real and imaginary part of the nonlinear parameter γ from a 1 cm long waveguide with a cross-section of 500x220nm 2 . The real and imaginary part of the nonlinear parameter are found to be 767W -1 m -1 and 28W -1 m -1 respectively. The figure of merit (FOM) is found to be 3.6 times larger then the FOM in crystalline silicon (c-Si).

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“…Another major application of slot waveguides is in high-speed nonlinear signal processing for communication systems. Record nonlinearity for a silicon waveguide was achieved recently by fi lling the slot with an organic material, which can off er much higher nonlinearity than silicon crystal [10]. Meanwhile, ultralow-loss waveguides fabricated using the local oxidation of silicon (LOCOS) technology have been used for realizing commercial siliconbased optoelectronic products [11].…”

Section: Passive Waveguide Devicesmentioning

confidence: 99%

Device engineering for silicon photonics

Chen

Tsang

2011

NPG Asia Mater

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A fter an impressive initial spurt of progress in device engineering during the early 2000s when the optical communications industry saw unprecedented levels of investment, silicon photonics continues to develop at an amazing pace. Many novel applications and devices are emerging. Silicon photonics has the potential to become a major platform for optoelectronic integrated circuits (OEICs) and to be used in high-speed optical interconnects for chip-level data communications because of the extremely large bandwidth and high speed off ered by optical communications. Many challenges have been addressed through the introduction of innovative ideas, paving the way for the practical deployment of silicon-based optoelectronic devices and integrated photonic circuits in computing and telecommunication systems [1]. Th e commercialization of silicon photonics, originally driven by applications in telecommunications, is now also driven by the needs of the computing industry for highspeed, energy-effi cient optical cable technology, such as the Light Peak Technology under development by Intel (USA). Th e California-based company Luxtera (USA) has also commercialized a series of siliconphotonic transceiver systems.Silicon off ers many advantages over alternative material systems (e.g. InP, GaAs, LiNbO 3 ) for OEIC applications. One major reason for the wide interest that silicon photonics is attracting is the cost advantage that silicon photonics can potentially off er through its compatibility with the complementary metal-oxide-semiconductor (CMOS) fabrication processes used in the microelectronics industry. Th e huge investments that have been made in CMOS microelectronics fabrication technologies has resulted in processes that off er much higher yield than is possible using alternative materials for photonics, thus making feasible large-scale integration and the production of silicon-photonic devices that are monolithically integrated with not only optical components but also electronic circuits in the same platform at ultrahigh density. Another reason for the attractiveness of silicon photonics is the high refractive index contrast between the silicon core (refractive index, 3.48) and silicon dioxide cladding (refractive index, 1.45) in silicon-on-insulator (SOI) devices, which ensures the submicrometer confi nement of light and allows tight bending in optical waveguides. Th e high-density integration of photonic circuits on SOI platforms is thus feasible. Th e low cost of high-quality SOI wafers is another advantage of silicon photonics. All kinds of low-cost devices enabled by silicon photonics are therefore predicted, and these may also enjoy the other benefi ts of monolithic integration: smaller size, increased power effi ciency and improved reliability. Figure 1 shows an example of a high-density integrated photonics devices fabricated on a 6-inch SOI wafer using CMOS-compatible technology.In this article, we review some of the exciting progress that has been made in silicon photonics with the aim of providing a broa...

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All-optical high-speed signal processing with silicon–organic hybrid slot waveguides

Cited by 854 publications

References 28 publications

Low-Loss Slot Waveguides with Silicon (111) Surfaces Realized Using Anisotropic Wet Etching

Low-Loss Slot Waveguides with Silicon (111) Surfaces Realized Using Anisotropic Wet Etching

Self phase modulation in highly nonlinear hydrogenated amorphous silicon

Device engineering for silicon photonics

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