Allocation of geometrical errors for developing precision measurement machine

Lai, Tao; Liu, Junfeng; Chen, Fulei; Li, Zelong; Guan, Chaoliang; Li, Huang; Xu, Chao; Hu, Hao; Dai, Yifan; Chen, Shanyong; Dai, Zhongxiang

doi:10.1007/s10845-024-02440-0

J Intell Manuf

2024

DOI: 10.1007/s10845-024-02440-0

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Allocation of geometrical errors for developing precision measurement machine

Tao Lai,

Junfeng Liu,

Fulei Chen

et al.

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2024

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Development of a Large-Aperture Coordinate Precision Measurement Instrument Using Differential Geometric Error Weighting

Li,

Kang,

et al. 2024

Applied Sciences

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The accuracy of traditional measuring machines is affected by the measuring range and sensitive geometric errors, and it is not possible to combine large caliber and high-precision measurements. This study proposes a differential geometric error-weighting method for designing a high-precision, large-diameter measuring machine. The machine utilized a zero-Abbe arm structure and applied the rigid body theory and small-angle hypothesis to model geometric errors. Weights were calculated for 23 geometric errors, identifying eight sensitive ones. A picometer-precision laser interferometer (quDIS) with a theoretical positioning accuracy of 0.2 nm/mm and standard flat rulers are used to ensure highly accurate positioning of the Y-axis/Z-axis of the measuring platform and reduce the straightness of both axes by approximately 75%, with radial and axial runout of the rotary table under 100 nm. The development and design method of the high-precision measuring machine proposed in this study is applicable to large-diameter high-precision flexible measurement, and the accurate control of measuring machine movement accuracy is realized by calculating the geometric error weights.

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Development of a Large-Aperture Coordinate Precision Measurement Instrument Using Differential Geometric Error Weighting

Li,

Kang,

et al. 2024

Applied Sciences

View full text Add to dashboard Cite

show abstract

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Allocation of geometrical errors for developing precision measurement machine

Cited by 1 publication

References 64 publications

Development of a Large-Aperture Coordinate Precision Measurement Instrument Using Differential Geometric Error Weighting

Development of a Large-Aperture Coordinate Precision Measurement Instrument Using Differential Geometric Error Weighting

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