Vopr. materialoved.
 2021
DOI: 10.22349/1994-6716-2020-104-4-109-112
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Alloy based on the al-mg system for developing a target for magnetron thin films sputtering

R. Yu. Bystrov
1
,
A. A. Belyakov
2
,
A. F. Vasiliev
3
et al.

Abstract: The article presents research results on the development of a precision alloy of the Al-Mg-Ce-La-Y system for obtaining thin films by magnetron sputtering. Thin films are used to create electronic components on their basis.

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