1992
DOI: 10.1557/proc-258-1127
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Amorphous Silicon Image Sensor Arrays

Abstract: We have developed a technology for 2D matrix-addressed image sensors using amorphous silicon photodiodes and thin film transistors. We have built a small prototype, having 192×192 pixels with a 20μm pixel pitch, and assessed its performance. The nip photodiodes can have dark current densities of less than 1011 A.cm-2 (up to 5V reverse bias) and peak quantum efficiencies of 88% (at 580nm). We operated the sensor in real time mode at high speed (50 Hz frame rate and 64μS line time). The image sensor has a low no… Show more

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Cited by 50 publications
(12 citation statements)
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“…With the gate pulse width of 12 ts nearly complete charge readout (> 98 %) is achieved, and hence there is only a small contribution of the readout process to image lag (cf. 3…”
Section: Demonstrator Performancementioning
confidence: 99%
“…With the gate pulse width of 12 ts nearly complete charge readout (> 98 %) is achieved, and hence there is only a small contribution of the readout process to image lag (cf. 3…”
Section: Demonstrator Performancementioning
confidence: 99%
“…In the indirect method the phosphor layer is used to absorb x rays and the resultant light photons are detected by an active matrix array with a single photo-diode and thin film transistor TFT switch at each pixel. 4,5,6,7 The photodiode absorbs the light given off by the phosphor in proportion to the x-ray energy absorbed. The TFTs are used to readout the stored charge to produce a digital image.…”
Section: Introductionmentioning
confidence: 99%
“…This widely perceived need has, in turn, stimulated considerable innovation resulting in a remarkable variety of [3] 450 256x240 61440 11.5x10.8 124 [4] 450 512x560 286720 23.0x25.2 580 [5] 450 512x560 286720 23.0x25.2(x4) 2318 [6] 270 64x40 2560 1.7x1.1 1.9 [2] 200 192x192 36864 3.8x3. 8 14.4 [7] 200 1024x1024 1048576 20x20 400 [8] 127 1536x1920 2929920 19.5x24.4 476 [9] 127 1536x1920 2929920 19.5x24.4 476 [10] 127 1536x1920 2929920 19 [13] 100 notavailable n.a. n.a.…”
Section: Introductionmentioning
confidence: 99%