An acoustic piezoelectric ring-shape Lamb wave MEMS resonator

Zolfaghari, Parviz; Zadehsafari, Mohsen; Akbari, Amir; Ghavifekr, Habib Badri

doi:10.1109/iceee2.2017.7935786

Cited by 2 publications

(1 citation statement)

References 31 publications

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“…Several researchers [8,9,10,11,12,13,14,15,16] have demonstrated the ring resonators or (disc resonator with hole is developed in center). It is noted that operating frequency, and design of resonator play an important role in the performance and improving the quality factor of resonators.…”

Section: Introductionmentioning

confidence: 99%

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan

Bao

et al. 2019

Micromachines

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This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonators are 188.55 MHz to 188.62 MHz. When the proposed SR (square rectangle) hole shaped one dimensional phononic crystal (1D PnC), and two dimensional phononic crystal (2D PnC) structure consist of very wide and complete band gaps is applied to novel design rings MEMS resonators, the quality factor (Q) further improved to 19.7 Million and 1750 Million, respectively, by using the finite element method. It is also observed that band gaps become closer by reducing the value of filling fraction, and proposed SR PnC gives extensive peak attenuation. Moreover, harmonic response of ring resonator is verified by the perfect match layers (PML) technique surrounded by resonators with varying width 1.5λ, and 3λ effectively reduce the vibration displacement.

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Section: Introductionmentioning

confidence: 99%

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Khan

Bao

et al. 2019

Micromachines

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Physical Sensors Based on Lamb Wave Resonators

Yu,

Yue,

Liang

et al. 2024

Micromachines

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A Lamb wave is a guided wave that propagates within plate-like structures, with its vibration mode resulting from the coupling of a longitudinal wave and a shear vertical wave, which can be applied in sensors, filters, and frequency control devices. The working principle of Lamb wave sensors relies on the excitation and propagation of this guided wave within piezoelectric material. Lamb wave sensors exhibit significant advantages in various sensing applications due to their unique wave characteristics and design flexibility. Compared to traditional surface acoustic wave (SAW) and bulk acoustic wave (BAW) sensors, Lamb wave sensors can not only achieve higher frequencies and quality factors in smaller dimensions but also exhibit superior integration and multifunctionality. In this paper, we briefly introduce Lamb wave sensors, summarizing methods for enhancing their sensitivity through optimizing electrode configurations and adjusting piezoelectric thin plate structures. Furthermore, this paper systematically explores the development of Lamb wave sensors in various sensing applications and provides new insights into their future development.

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An acoustic piezoelectric ring-shape Lamb wave MEMS resonator

Cited by 2 publications

References 31 publications

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

Physical Sensors Based on Lamb Wave Resonators

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