1996
DOI: 10.1007/s0021663550532
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An active spectroscopical study on the plasma parameters of an ICP

Abstract: Various techniques to measure the electron density and temperature of a 100 MHz inductively coupled plasma (ICP) are compared with each other. Apart from passive spectroscopy of measuring the shape of (e.g. H(beta)) and the area under emission lines we explored the field of active spectroscopy. Non-intrusive and specific are the methods of diode laser absorption (DLA) of an argon 4s-4p transition and Thomson scattering (TS). Intrusive and global is the power interruption (PI) technique: the response of line (a… Show more

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Cited by 12 publications
(5 citation statements)
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“…During the following years it is used to examine the plasma of different arc discharges [33][34][35]. Among other applications, the method is later employed on cascaded arcs [20,22,[36][37][38], ICPs [39][40][41][42] and transferred arcs [43].…”
Section: Relaxation Methodsmentioning
confidence: 99%
“…During the following years it is used to examine the plasma of different arc discharges [33][34][35]. Among other applications, the method is later employed on cascaded arcs [20,22,[36][37][38], ICPs [39][40][41][42] and transferred arcs [43].…”
Section: Relaxation Methodsmentioning
confidence: 99%
“…This ICP is much more voluminous than the described microwave plasmas and has a radius r p of approximately 1 cm and a height of 4 cm. Typical ICP parameters are given by n e = 10 21 m −3 , T e = 1 × 10 4 K and T h = (5-7) × 10 3 K (using a power input P = 1.3 kW and a total argon flow [Ar] = 13 l min −1 ) [12,13,[21][22][23].…”
Section: The Plasma Sourcesmentioning
confidence: 99%
“…Experimental results will be presented in section 4. Several experimental results will be compared to results previously obtained from a 100 MHz argon ICP [12,13,[21][22][23]. Conclusions will be given in section 5.…”
Section: Introductionmentioning
confidence: 98%
“…Within a very short time (< 1 µs) they will largely thermalize with heavy particles and will therefore be cooled down towards a temperature close to T h [11,12]. This instantaneous decrease in T e will affect the densities of excited states.…”
Section: → → →mentioning
confidence: 99%
“…4 a typical response to power interruption of a level with a Saha-like behavior is plotted [12]. Measurements are performed with a 100 MHz argon ICP operated at 1.3 kW [11].…”
Section: → → →mentioning
confidence: 99%