An Analytic Framework of Design for Semiconductor Manufacturing

Abstract

Abstract. The manufacturing intelligence behind data, process, and system are used to assist extracted from a large amount of manufacturing-related data from many sources, which presents the relevant knowledge to enhance decision quality with operational efficiency. Based on the data-driven view, this study aims to develop an analytic framework of design for semiconductor manufacturing. To demonstrate the proposed framework, a case study in semiconductor manufacturing regarding the layout design of chip size was conducted. The proposed framework can be used to extract useful information and assist effectively process operation by data mining methods with hybrid algorithms to enhance decision quality and production effectiveness.