Abstract:For the design of a force sensor in low temperature co-fired ceramics (LTCC) technology, the modulus of elasticity of the underlying LTCC substrate is an essential design parameter. Since the LTCC substrate may be subjected to forces that could exceed the flexural strength of a single LTCC layer, multiple LTCC tapes are laminated together in order to increase the maximum applicable force. Preceding measurements did show that the effective modulus of elasticity of LTCC laminates is below the modulus of elastici… Show more
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