An efficient design of dual-axis MEMS accelerometer considering microfabrication process limitations and operating environment variations

Abstract

PurposeThis paper aims to present an efficient design approach for the micro electromechanical systems (MEMS) accelerometers considering design parameters affecting the long-term reliability of these inertial sensors in comparison to traditional iterative microfabrication and experimental characterization approach. Design/methodology/approachA dual-axis capacitive MEMS accelerometer design is presented considering the microfabrication process constraints of the foundry process. The performance of the MEMS accelerometer is analyzed through finite element method– based simulations considering main design parameters affecting the long-term reliability. The effect of microfabrication process induced residual stress, operating pressure variations in the range of 10 mTorr to atmospheric pressure, thermal variations in the operating temperature range of −40°C to 100°C and impulsive input acceleration at different input frequency values is presented in detail. FindingsThe effect of residual stress is negligible on performance of the MEMS accelerometer due to efficient design of mechanical suspension beams. The effect of operating temperature and pressure variations is negligible on energy loss factor. The thermal strain at high temperature causes the sensing plates to deform out of plane. The input dynamic acceleration range is 34 g at room temperature, which decreases with operating temperature variations. At low frequency input acceleration, the input acts as a quasi-static load, whereas at high frequency, it acts as a dynamic load for the MEMS accelerometer. Originality/valueIn comparison with the traditional MEMS accelerometer design approaches, the proposed design approach focuses on the analysis of critical design parameters that affect the long-term reliability of MEMS accelerometer.

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“…Similarly, the net capacitance change for an input acceleration is strongly dependent on the initial air gap between the stator and rotor combs. In addition to the geometric design parameters, the performance of the MEMS accelerometer is affected by the operating temperature and air pressure conditions, which has been discussed in detail in [6,23]. In this work, we have considered both the MEMS accelerometer geometric design parameters and operating conditions as parameters for the optimization.…”

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