An Electrostatic Technique for Purifying Photoresists

Abstract

not Available.

Plasma photoresist stripping in a planar reactor

“…During the stripping process these contaminations assisted by the electric field diffuse into the oxide and cause a deterioration of the MOS device characteristics. I n order to avoid this undesirable effect, electrostatic purification of the photoresist KTFR should be used [13].…”