“…Pouthas et al, 2004;Kim et al, 2004), and/or on the detection of the intrinsic charge of molecules adsorbed onto the sensors surface (Fritz et al, 2004;Uslu et al, 2004;Sakata et al, 2005;Purushothaman et al, 2006). In literature, ISFET structures have been widely reported for several types of sensors, ranging form the more conventional for these devices pH sensors (Bergveld et al, 1998;Chin et al, 2001;Grattarolla and Massobrio, 2002;Martinoia and Massobrio, 2000;Martinoia et al, 2001), or biochemical sensors (Lauwers et al, 2001), to more exotic ones, such as sensors for detection of micro-organisms in water (Cambiaso et al, 1996), for cell population measurements (Martinoia et al, 2001), and so on. The ISFET sensitive layer is here made of silicon nitride (Si 3 N 4 ) (Siu and Cobbold, 1979).…”