An Inverted T-shaped MEMS Capacitive Pressure Sensor&lt;br /&gt;with Multiple-Diaphragm Anchor and On-chip Temperature Sensor

Kurui, Yoshihiko; Ishibashi, Fumitaka; Masunishi, Kei; Saito, Tomohiro; Nagata, Tsutomu; Yamazaki, Hiroaki; Nakamura, Norimasa

doi:10.7567/ssdm.2020.c-9-03

Extended Abstracts of the 2020 International Conference on Solid State Devices and Materials 2020

DOI: 10.7567/ssdm.2020.c-9-03

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An Inverted T-shaped MEMS Capacitive Pressure Sensor<br />with Multiple-Diaphragm Anchor and On-chip Temperature Sensor

Yoshihiko Kurui¹,

Fumitaka Ishibashi²,

Kei Masunishi³

et al.

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An Inverted T-shaped MEMS Capacitive Pressure Sensor<br />with Multiple-Diaphragm Anchor and On-chip Temperature Sensor

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