IEEE J. Solid-State Circuits
 2024
DOI: 10.1109/jssc.2024.3349861
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An Ultralow-Power Triaxial MEMS Accelerometer With High-Voltage Biasing and Electrostatic Mismatch Compensation

Yimai Peng,
Seokhyeon Jeong,
Kyojin Choo
et al.
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