Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors

Kangül, Mustafa; Aydın, Eren; Gökçe, Furkan; Zorlu, Özge; Külah, Haluk

doi:10.1109/jmems.2017.2729624

Cited by 10 publications

(2 citation statements)

References 12 publications

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“…A large number of nanoresonators have problems with low real-time performance and low accuracy. In order to solve this problem, some studies were performed in which the influence of the external driving force on the resonance characteristics such as the natural frequency and quality factor of the resonator was investigated [15], and the measurement circuit was improved to reduce the frequency fluctuation and improve the measurement accuracy [16,17]. Several studies have been carried out in the literature [13,18,19] on closed-loop control of the resonator, in which researchers studied the dynamics of the adsorption mass on the upper surface of the resonator, analyzed the adsorption noise through closed-loop measurement, and observed the diffusion noise of the adsorption mass.…”

Section: Introductionmentioning

confidence: 99%

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

Cai

2022

Micromachines

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To realize the real-time measurement of masses of nanoparticles, virus molecules, organic macromolecules, and gas molecules, and to analyze their physical and chemical properties, a ZnO nanowire (NW) resonator operating at room temperature with an ultrahigh resonant frequency, real-time detection, and high precision was designed and developed in this study. The machining method is simple and easy to integrate into an integrated circuit. A closed-loop detection system based on a phase-locked loop (PLL) and frequency modulation technology (FM) was used to perform closed-loop testing of electromagnetically excited ZnO NW. The first-order resonance frequency of the resonator was 10.358 MHz, the quality factor Q value was about 600, the frequency fluctuation value fRMS was about 300 Hz, and the FM range could reach 200 kHz. The equivalent circuit model of the resonator was established, the parasitic parameters during the test were obtained, and the frequency accuracy and phase noise of the resonator were analyzed and tested. The experimental results show that the closed-loop system can automatically control the resonator in a wide range of frequency bands, with good tracking performance of the resonant frequency, small frequency fluctuation, and low phase noise level.

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Section: Introductionmentioning

confidence: 99%

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

Cai

2022

Micromachines

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“…Therefore, there is a need to develop a technique that can guarantee an utmost suppression of parasitic effects on electro-thermal piezoresistive cantilever sensors. Some work uses dual sensor systems that are fabricated in the same chip for cancelling the parasitic effects [11][12][13]. However, implementation of dual sensor systems will enlarge the sensor size and increase its power consumption.…”

Section: Introductionmentioning

confidence: 99%

Real-Time Frequency Tracking of an Electro-Thermal Piezoresistive Cantilever Resonator with ZnO Nanorods for Chemical Sensing

Setiono

Fahrbach

et al. 2019

Chemosensors

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The asymmetric resonance response in electro-thermal piezoresistive cantilever resonators causes a need of an optimization treatment for taking parasitic actuation-sensing effects into account. An electronic reference circuit for signal subtraction, integrated with the cantilever resonator has the capability to reduce the effect of parasitic coupling. Measurement results demonstrated that a symmetric amplitude shape (Lorentzian) and an optimized phase characteristic (i.e., monotonically decreasing) were successfully extracted from an asymmetric resonance response. With the monotonic phase response, real-time frequency tracking can be easier to implement using a phase-locked loop (PLL) system. In this work, an electro-thermal piezoresistive cantilever resonator functionalized with self-assembled monolayers of chitosan-covered ZnO nanorod arrays as sensitive layers has been investigated under different relative humidity (rH) levels. Enhancement of resonance phase response has been demonstrated by implementing the reference signal subtraction. Subsequently, a lock-in amplifier integrated with PLL system (MFLI, Zurich Instruments, Zurich, Switzerland) was then employed for continuously tracking the resonant frequency. As a result, we find a good correlation of frequency shift (∆f0) with change in rH monitored using a commercial reference sensor.

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Harmonic biasing in a double-sided comb-drive resonator, for resolving feed-through issues in low-power driving

Kassie

Elata

2021

Sensors and Actuators A: Physical

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Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors

Cited by 10 publications

References 12 publications

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

A Precise Closed-Loop Controlled ZnO Nanowire Resonator Operating at Room Temperature

Real-Time Frequency Tracking of an Electro-Thermal Piezoresistive Cantilever Resonator with ZnO Nanorods for Chemical Sensing

Harmonic biasing in a double-sided comb-drive resonator, for resolving feed-through issues in low-power driving

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