Analysis and Restriction About Accumulated Phase Error in Spacial Frequency-Domain Algorithm for White-Light Interferomety

Qinyuan, 邓钦元 Deng; Qingqing, 黄庆卿 Huang; Jie, 侯杰 Hou; Yan, 张焱 Zhang; Fei, 熊飞 Xiong; Junhua, 陈俊华 Chen

doi:10.3788/lop202158.0718001

激光与光电子学进展

2021

DOI: 10.3788/lop202158.0718001

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Analysis and Restriction About Accumulated Phase Error in Spacial Frequency-Domain Algorithm for White-Light Interferomety

邓钦元 Deng Qinyuan¹,

黄庆卿 Huang Qingqing²,

侯杰 Hou Jie³

et al.

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Analysis and Restriction About Accumulated Phase Error in Spacial Frequency-Domain Algorithm for White-Light Interferomety

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