2005
DOI: 10.1016/j.actamat.2005.05.017
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Analysis of the etching behavior of ZnO ceramics

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Cited by 48 publications
(37 citation statements)
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“…ZnO is one of the most widely used wurtzite structured materials, not only as single crystal but also as bulk or thin-films [3]. ZnO powders have many interesting properties such as electrical, dielectric, piezoelectric, pyroelectric, acousto-optic, electro-optic, nonlinear optic [4].…”
Section: Introductionmentioning
confidence: 99%
“…ZnO is one of the most widely used wurtzite structured materials, not only as single crystal but also as bulk or thin-films [3]. ZnO powders have many interesting properties such as electrical, dielectric, piezoelectric, pyroelectric, acousto-optic, electro-optic, nonlinear optic [4].…”
Section: Introductionmentioning
confidence: 99%
“…The presence of IB is the characteristic microstructure for the Sb 2 O 3 -doped ZnO [10,11]. Furthermore, its presence is revealed only by [11]. Figure 9 shows the corresponding curves for the size distribution of ZnO grains in the specimens shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…[4][5][6] For less compact ZnO films deposited at lower substrate temperatures, mild etching agents such as NH 4 Cl have to be utilized to achieve sufficient roughnesses. 7,8 Even though the chemical etching of single crystalline ZnO has been thoroughly investigated in the 1960s 9,10 on the basis of a dangling bond model, 11 a significant complexity arises from the polycrystalline nature of sputter-deposited ZnO:Al thin films. Since the etch rate is strongly dependent on the crystalline orientation, 10 an inhomogeneous etching occurs on structurally heterogeneous substrates leading to complex topographies as the material corrosion proceeds.…”
Section: Manuscriptmentioning
confidence: 99%