Mass Spectrometry Handbook 2012
DOI: 10.1002/9781118180730.ch41
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Analysis of thin and thick Films

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Cited by 2 publications
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“…the elements, [14,17] which together with the ability of clean material ablation [19][20][21][22] and high pulse-to-pulse reproducibility enable a laser ablation in a highly controlled manner. [4,17] So far, various LIMS systems have been designed and constructed specifically to investigate different scientific questions and for the application in variable environments, ranging from elemental mapping [8,23] to depth profiling analyses, [4,16] from laboratory [7,8,12,[14][15][16]24,25] instruments to instruments with the capability to operate on planetary objects. [17,[26][27][28][29][30][31] However, and to our best current knowledge, only the designs from the research groups of Huang, [8,14,15,24] Cui et al, [16] and Wurz, [4,13,17,23,32] have reached the measurement capabilities and performance comparable to the state-of-the-art measurement techniques for chemical analysis with high spatial resolution.…”
Section: Methodsmentioning
confidence: 99%
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“…the elements, [14,17] which together with the ability of clean material ablation [19][20][21][22] and high pulse-to-pulse reproducibility enable a laser ablation in a highly controlled manner. [4,17] So far, various LIMS systems have been designed and constructed specifically to investigate different scientific questions and for the application in variable environments, ranging from elemental mapping [8,23] to depth profiling analyses, [4,16] from laboratory [7,8,12,[14][15][16]24,25] instruments to instruments with the capability to operate on planetary objects. [17,[26][27][28][29][30][31] However, and to our best current knowledge, only the designs from the research groups of Huang, [8,14,15,24] Cui et al, [16] and Wurz, [4,13,17,23,32] have reached the measurement capabilities and performance comparable to the state-of-the-art measurement techniques for chemical analysis with high spatial resolution.…”
Section: Methodsmentioning
confidence: 99%
“…Va rious sensitive and high-resolution measurement techniques available nowadays on the market, such as Auger Electron Spectroscopy (AES), [9,10] X-ray Photoelectron Spectroscopy (XPS), [9,11] Secondary Ion Mass Spectrometry (SIMS) [5,9] and Secondary Neutron Mass Spectroscopy (SNMS), [12] Glow Discharge Time-of-Flight Mass Spectrometry (GD-TOF-MS) [1,9] or Laser Ablation Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) [2,6,9] are widely applied for the understanding of the above listed questions concerning the chemical composition of solid materials. Each analytical technique differs in its measurement capabilities and limitations, including e.g.…”
Section: Introductionmentioning
confidence: 99%
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