angular coaxial transmission line structures with inherently low loss, high isolation, and very small turn radius, as compared to even the smallest commercial circular coax. A pleasant surprise is the relatively small deleterious effect of the structural nickel and of the sacrificial-metal release holes of the EFAB process. Clearly, more attention must be paid to the design of the GSG contacts, and the RF performance would probably improve through the use of a higher conductivity metal such as copper. However, this demonstration helps pave the way toward more sophisticated and highly integrated passive components, such as directional couplers and hybrids in analog signal-processing and beam-forming networks.