Angle-dependent total electron yield spectra in multilayer films for standing wave measurements

Abstract

By analyzing angle-dependent TEY spectra measured with fluorescence spectra, the depth-dependence of the absorbed energy in a Ru/B 4 C reflection multilayer film was obtained as follows. The periodic multilayer structure was obtained as [Ru 24.38Å/B 4 C 36.57Å] and [Ru 24.06Å/B 4 C 36.09Å] by GIXRD and reflectance measurements respectively. The angles of incidence of the fluorescence spectra were determined as 16° and 41° using the angle dependent TEY spectra measured with the fluorescence spectra. The depth-dependence of the absorbed energy, which represents the intensity of the fluorescence spectrum, was calculated using these parameters. These results suggest that an angle-dependent TEY measurement can be used as an easy phase-determination method for standing waves that are generated by a reflection multilayer.