Angle resolved detection of charged particles with a novel type toroidal electrostatic analyser

Smeenk, R.G.; Tromp, R. M.; Kersten, Holger; Boerboom, A.J.H.; Saris, F. W.

doi:10.1016/0029-554x(82)90022-2

Cited by 177 publications

(8 citation statements)

References 8 publications

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“…In other words, we consider the trajectories as if they were the inverse compared with the trajectories given by Moestue (1973) andGough ( 1970). This factor is quite important as will be shown below, and as it was shown by similar consideration in Ghielmetti and Shelly ( 1990), Smeenk et al (1982), Toffoletto et al 1985, and Yavor et al (1992.…”

Section: Theoretical Considerationssupporting

confidence: 54%

An annular toroidal backscattered electron energy analyser for use in scanning electron microscopy

Рау

Robinson²

1996

Scanning

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A backscattered electron energy spectrometer, based on a toroidal energy analyser and an annular detector, has been devised and adapted for use in a scanning electron microscope. Computer simulations have been carried out for equipotentials and trajectories of electrons in the toroidal deflector, which permit the optimisation of the energy analyser characteristics for special applications. Based upon these results, a device has been built and its efficiency is demonstrated by selected images of a multilayered structure and a series of recorded backscattered electron spectra.

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Section: Theoretical Considerationssupporting

confidence: 54%

An annular toroidal backscattered electron energy analyser for use in scanning electron microscopy

Рау

Robinson²

1996

Scanning

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“…The detection system consists of a Toroidal Electrostatic Analyzer (TEA) that collect the backscattered H + ions from the collision between the incident beam and the sample. At the top end of the TEA a set of two micro-channel plates coupled to a position-sensitive detector allows the determination of the scattering energy and angle for each impinging ion 22,23 . This detection system was centered at 120° with respect to the incident beam.…”

Section: Methodsmentioning

confidence: 99%

Unraveling structural and compositional information in 3D FinFET electronic devices

Trombini

Marmitt

Alencar

et al. 2019

Sci Rep

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Non-planar Fin Field Effect Transistors (FinFET) are already present in modern devices. The evolution from the well-established 2D planar technology to the design of 3D nanostructures rose new fabrication processes, but a technique capable of full characterization, particularly their dopant distribution, in a representative (high statistics) way is still lacking. Here we propose a methodology based on Medium Energy Ion Scattering (MEIS) to address this query, allowing structural and compositional quantification of advanced 3D FinFET devices with nanometer spatial resolution. When ions are backscattered, their energy losses unfold the chemistry of the different 3D compounds present in the structure. The FinFET periodicity generates oscillatory features as a function of backscattered ion energy and, in fact, these features allow a complete description of the device dimensions. Additionally, each measurement is performed over more than thousand structures, being highly representative in a statistical meaning. Finally, independent measurements using electron microscopy corroborate the proposed methodology.

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“…The specimen was analysed using the MEIS 7,8 facility at Daresbury Laboratory, which is described in detail elsewhere. 9,10 A 100 keV He C ion beam of dimensions 1.0 mm ð 0.5 mm was incident on the specimen and scattered He C ions were detected by a toroidal electrostatic analyser 11 equipped with a two-dimensional readout microchannel plate detector, providing simultaneous detection of energy and angle. A single data set is ¾2% in energy and 24°in angle with an energy resolution that is 0.24% of the pass energy and an angular resolution of <0.3°.…”

Section: Methodsmentioning

confidence: 99%

Composition and structure of enriched alloy layers in filmed Al alloys studied by medium‐energy ion scattering

Bailey

Skeldon

Noakes

et al. 2001

Surface & Interface Analysis

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The topmost 20 nm of an electropolished Al-1 at.% Cu alloy has been investigated at sub-nanometre resolution using medium-energy ion scattering. Differences in the composition and depth of the enriched Cu layer are observed. Most significantly, the enriched layer contains regions of differing structure and/or lattice orientation with Cu atoms located in distinct ordered regions, consistent with the presence of Cu-rich clusters. Surface-segregated Si and Cu are observed and Cl and Cu are found in the oxide.

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Angle resolved detection of charged particles with a novel type toroidal electrostatic analyser

Cited by 177 publications

References 8 publications

An annular toroidal backscattered electron energy analyser for use in scanning electron microscopy

An annular toroidal backscattered electron energy analyser for use in scanning electron microscopy

Unraveling structural and compositional information in 3D FinFET electronic devices

Composition and structure of enriched alloy layers in filmed Al alloys studied by medium‐energy ion scattering

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