2024 IEEE 14th International Conference Nanomaterials: Applications &Amp;amp; Properties (NAP) 2024
DOI: 10.1109/nap62956.2024.10739705
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Annealing Effect on Structural and Mechanical Properties of Atomic Layer Deposited Cr2O3 Films Doped with Ti and Al

Mahtab Salari Mehr,
Lauri Aarik,
Taivo Jõgiaas
et al.
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