Annealing effects on structural and electrical properties of fluorinated amorphous carbon films deposited by plasma enhanced chemical vapor deposition

Yi, Jeong W.; Lee, Young Ho; Farouk, Bakhtier

doi:10.1016/s0040-6090(02)00614-4

Cited by 12 publications

(12 citation statements)

References 13 publications

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“…The FTIR absorption peaks of the diamond-like structure had a wave number of 900 cm −1 to 1400 cm −1 . For the main absorption peaks, 1030, 1070, 1160, and 1260 cm −1 corresponded to the C-C, CF, CF 2 (SS), and CF 2 (AS) absorption peaks, respectively [7,23,24]. The FTIR spectra (900 cm −1 to 1400 cm −1 range) of the F-DLC films deposited under different are shown in Figure 2.…”

Section: Resultsmentioning

confidence: 98%

“…In recent years, fluorinated amorphous carbon film (a-C:F) has attracted the attention of researchers for its application as a film with a low dielectric constant [1][2][3], a self-lubricating and low friction resistance film [4,5], an antireflection film with low refractive index and small dispersion, or a protective film against strong ultraviolet absorption [6,7]. Carbon atoms form chemical bonds via three different hybridizations, namely, sp 1 , sp 2 , and sp 3 , in amorphous carbon, including diamond-like carbon (DLC) film, graphite-like carbon (GLC) film, and polymer-like carbon (PLC) film.…”

Section: Introductionmentioning

confidence: 99%

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Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F‐DLC Film

Jiang

Xiao

et al. 2013

Journal of Nanomaterials

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Fluorinated diamond-like carbon (F-DLC) films were prepared by radio frequency plasma-enhanced chemical vapor deposition technique with CF4and CH4as source gases under different deposition conditions. The chemical bonding structure and composition of the films were detected by Raman, Fourier transform infrared absorption spectrometry (FTIR), and X-ray photoelectron spectroscopy (XPS) characterization. The micromorphology and surface roughness of the film were observed and analyzed by atomic force microscopy (AFM). The results indicated that all the prepared films presented a diamond-like carbon structure. The relative content of fluorine in the films increased, containing more CF2groups. The ratio of hybrid structure sp3/sp2decreased. The surface roughness of the films increased when the gas flow ratioR(R = CF4/[CH4 + CF4]) or the deposition power increased. The contact angle of water with the surface of the F-DLC film was measured with a static drop-contact angle/surface tension measuring instrument. The hydrophobic property of the F-DLC films was found to be dependent on the sp2structure, fluorine content, and surface roughness of the films. The contact angle increased when the relative content of fluorine in the films and sp2content increased, whereas the contact angle first increased and then decreased with the surface roughness.

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Section: Resultsmentioning

confidence: 98%

Section: Introductionmentioning

confidence: 99%

Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F‐DLC Film

Jiang

Xiao

et al. 2013

Journal of Nanomaterials

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“…2(b) correlate with the behavior of C C@C ðtÞ and C C-H ðtÞ respectively. Yi et al [13] reported about annealing of a-C:F films at different temperatures in the range from T a ¼ 250 to 350°C. The films were deposited at room temperature and then annealed.…”

Section: Resultsmentioning

confidence: 99%

Carbon films deposited by low frequency plasma as inter-metal dielectric

Zúñiga

Torres

Kosarev

2003

Journal of Non-Crystalline Solids

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“…The corresponding relationship between the characteristic frequencies of all chemical bonds and functional groups and the peak positions on the FTIR spectrum of the N-doped F-DLC films is shown in Table I. 2,[23][24][25] Figure 2 shows the FTIR spectra within the wave number range of 800 to 1800 cm À1 at different R values. From Fig.…”

Section: Ftir Analysis Of F-dlc Filmsmentioning

confidence: 99%

Effect of Nitrogen Doping on the Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Films

Xiao¹,

Jiang

Wang³

2013

Jpn. J. Appl. Phys.

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Radio-frequency plasma-enhanced chemical vapor deposition technology was applied to the manufacture of nitrogen-doped fluorinated diamond-like carbon films under different nitrogen flow ratios. Atomic force microscopy, Fourier transform infrared absorption spectroscopy, X-ray photoelectron spectroscopy, and ultraviolet–visible spectroscopy were performed to determine the surface morphology, microscopic structure, and optical properties of the films. The spectra of the films were analyzed using a Gaussian peak-fitting algorithm. The films manufactured using this technology were compact and even. As the nitrogen flow ratio increased, the surface roughness of the films decreased. Nitrogen doping was favorable for graphite phase formation in the films. Moreover, the number of sp2 structures increases. The optical band gap initially increased and then decreased as the nitrogen flow ratio increased slightly.

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Annealing effects on structural and electrical properties of fluorinated amorphous carbon films deposited by plasma enhanced chemical vapor deposition

Cited by 12 publications

References 13 publications

Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F‐DLC Film

Effect of Structure, Composition, and Micromorphology on the Hydrophobic Property of F‐DLC Film

Carbon films deposited by low frequency plasma as inter-metal dielectric

Effect of Nitrogen Doping on the Structure and Optical Band Gap of Fluorinated Diamond-Like Carbon Films

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