Abstract:The effect of annealing temperature on the surface morphology and electrical properties of composite bilayer, TiO 2 /ZnO were studied in this investigation. The composite thin films were applied as the sensing membrane of an Extended Gate Field-Effect Transistor (EGFET) based pH sensor. TiO 2 and ZnO were deposited on Indium Tin Oxide (ITO) by using sol-gel spin-coating process. The effects of the varied parameter on the sensor sensitivity and linearity were also investigated. The sensitivity of the TiO 2 thin… Show more
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.