Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication

Li, Y.; Parkes, W.; Haworth, Leslie; Stokes, Adam A.; Muir, K.R.; Li, Peng; Collin, Adam J.; Hutcheon, N.G.; Henderson, Robert K.; Rae, Bruce R.; Walton, A.J.

doi:10.1016/j.sse.2008.04.030

Cited by 54 publications

(42 citation statements)

References 19 publications

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“…The actuation voltage is inversely proportional to the areal capacitance of the dielectric layer [25][26][27][28]. Therefore, the actuation voltage can be reduced by using thinner insulator and/or insulator with higher dielectric constant.…”

Section: B Methodsmentioning

confidence: 99%

Distributed Circuit Model for Multi-Color Light-Actuated Opto-Electrowetting Microfluidic Device

Pei

Valley

Wang

et al. 2015

J. Lightwave Technol.

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We report on a distributed circuit model for multicolor light-actuated opto-electrowetting devices. The model takes into consideration the large variation of absorption coefficient (15x) of photoconductors in the visible spectrum and the nonuniform distribution of photo-generated carriers. With the help of this model, we designed opto-electrowetting devices with optimum thickness of photoconductors. This leads to significant improvement in performance compared with prior reports, including 200x lower optical power, 5x lower voltage, and 20x faster droplet moving speed. This enables the use of commercial projectors to create on-demand 'virtual' electrodes for large-scale, parallel manipulation of droplets. We have achieved simultaneous manipulation of 96-droplet array. Finally, we have demonstrated parallel on chip detection of Herpes Simplex Virus Type 1 within 45 minutes using a real-time isothermal polymerase chain reaction assay.

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Section: B Methodsmentioning

confidence: 99%

Distributed Circuit Model for Multi-Color Light-Actuated Opto-Electrowetting Microfluidic Device

Pei

Valley

Wang

et al. 2015

J. Lightwave Technol.

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“…At the earliest stage, Li et al [15], [16] introduced CMOS compatible fabrication procedures for digital microfluidic systems which triggered the possibility of integrating semiconductor devices into a digital microfluidic system. After that, a number of applications has been developed based on such integration [17]- [19].…”

Section: B Semiconductor Devices Integrated Digital Microfluidicsmentioning

confidence: 99%

“…Nevertheless, a complex circuit may still lead to some issues such as power consumption, low tolerance, etc., though such issues may not be as critical as those of the electrode array. Moreover, the fabrication process of the integrated circuit in microfluidic technology is different from conventional CMOS technology [16]. Therefore, although optimizing the integrated logic circuit is not a critical issue in our design, it is still preferable to consider the logic complexity of the integrated circuit, and also, the logic optimization may be needed for the future technology.…”

Section: Logic Optimization Problemmentioning

confidence: 99%

“…After that, ET i is encoded by h 1 , i.e., δ(ET i ) = h 1 (lines 9-12). Conversely, if ET j has not been encoded while the value of δ(ET i ) has already been determined, we perform a similar procedure with the above case (lines [14][15][16][17]. The key idea of choosing v i , v j and the encoding values for ET i , ET j is that the smaller the Hamming distance between δ(ET i ) and δ(ET j ) is, the higher probability that the logic functions of the common electrodes between δ(ET i ) and δ(ET j ) can be reduced.…”

Section: B Algorithmmentioning

confidence: 99%

See 1 more Smart Citation

An Optimal Pin-Count Design With Logic Optimization for Digital Microfluidic Biochips

Dinh

Yamashita

2015

IEEE Trans. Comput.-Aided Des. Integr. Circuits Syst.

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Digital microfluidic biochips have become one of the most promising technologies for biomedical experiments. In modern microfluidic technology, reducing the number of independent control pins that reflects most of the fabrication cost, power consumption, and reliability of a microfluidic system, is a key challenge for every digital microfluidic biochip design. However, all the previous chip designs sacrifice the optimality of the problem, and only limited reduction on the number of control pins is observed. Moreover, most existing designs cannot satisfy high-throughput demand for bioassays, and thus inapplicable in practical contexts. In this paper, we propose the first optimal pin-count design scheme for digital microfluidic biochips. By integrating a very simple combinational logic circuit into the original chip, the proposed scheme can provide high-throughput for bioassays with an information-theoretic minimum number of control pins. Furthermore, to cope with the rapid growth of the chip's scale, we also propose a scalable and efficient heuristics to reduce the number of control pins. A logic optimization technique, which can be used to reduce the complexity of the integrated combinational logic circuit, is also presented in this paper. Experiments demonstrate that the proposed scheme can obtain much fewer number of control pins compared with the previous state-of-the-art works.

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“…11 Impedance function of DI water measured on different electrode setups protected by dielectric layers of different thickness and composition oxide (ZrO). These materials were reported to be suitable for a low voltage EWOD actuation of micro fluidic droplets (Li et al 2008). …”

Section: Isolation Materialsmentioning

confidence: 99%

Integration of impedance spectroscopy sensors in a digital microfluidic platform

et al. 2012

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Digital microfluidics combines the advantages of a low consumption of reagents with a high flexibility of processing fluid samples. For applications in life sciences not only the processing but also the characterization of fluids is crucial. In this contribution, a microfluidic platform, combining the actuation principle of electrowetting on dielectrics for droplet manipulations and the sensor principle of impedance spectroscopy for the characterization of the fluid composition and condition, is presented. The fabrication process of the microfluidic platform comprises physical vapor deposition and structuring of the metal electrodes onto a substrate, the deposition of a dielectric isolator and a hydrophobic top coating. The key advantage of this microfluidic chip is the common electric nature of the sensor and the actuation principle. This allows for fabricating digital microfluidic devices with a minimal number of process steps. Multiple measurements on fluids of different composition (including rigid particles) and of different conditions (temperature, sedimentation) were performed and process parameters were monitored online. These sample applications demonstrate the versatile applications of this combined technology.

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Anodic Ta2O5 for CMOS compatible low voltage electrowetting-on-dielectric device fabrication

Cited by 54 publications

References 19 publications

Distributed Circuit Model for Multi-Color Light-Actuated Opto-Electrowetting Microfluidic Device

Distributed Circuit Model for Multi-Color Light-Actuated Opto-Electrowetting Microfluidic Device

An Optimal Pin-Count Design With Logic Optimization for Digital Microfluidic Biochips

Integration of impedance spectroscopy sensors in a digital microfluidic platform

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