Anodically oxidized porous silicon as a substrate for EIS sensors

Silicon Porosification: State of the Art

“…110,[476][477][478] Many oxidation methods exist, such as aging in ambient, 479 exposure to water vapor, [480][481][482] anodic oxidation in a non-fluoride electrolyte, 142,179,[483][484][485] 479 and thermal oxidation in wet and dry O 2 fluxes, 189,381,[488][489][490][491] including rapid thermal oxidation. 477 A data review regarding a wide range of oxidation treatments (e.g., thermal treatments, electrochemical and chemical oxidation, pthotochemical oxidation, etc.)…”

“…178,179,499,500 Besides that, the transformation of porous silicon into oxidized PSi also allows achieving light transmission in the visible wavelength range. 478 As was shown, oxidized PSi could also be successfully used for the elaboration of gas sensors, 189 electrochemical sensors, 484 biosensors, 162 and device insulation. 501…”

Electrochemical Investigation of P-Tert-Butylcalix[6]Arene Modified Gold Electrode for Ionic Detection

“…Impedance [34] spectroscopy was used to characterize the proposed structure. It was shown that by using gold electrode as transducer the detection limit is larger than those obtained with flat or porous heterostructures.…”

Thermal Properties of Porous Silicon

“…Besides that, the transformation of porous silicon into oxidized PSi also allows achieving light transmission in the visible wavelength range (Amato et al 1997). As was shown, oxidized PSi could also be successfully used for the elaboration of gas sensors (Maccagnani et al 1998;Ozdemir and Gole 2007), electrochemical sensors (Sakly et al 2006), biosensors (Naveas et al 2013), and device insulation (Park and Lee 2003). It was found that oxidation can produce biocompatible surfaces, which can be further functionalized by silanization (Riikonen et al 2012).…”

“…For example, Aggarwal et al (2014) have shown that PSi samples oxidized under O 2 atmosphere had excellent stable surface and no degradation observed even after one year. Many oxidation methods exist, such as aging in ambient (Salonen et al 1997a), exposure to water vapor (Ogata et al 1995;Salonen et al 1997b;Ogata et al 2000), anodic oxidation in a nonfluoride electrolyte (Yamana et al 1990;Guerrero-Lemus et al 1999;Mulloni and Pavesi 2000;Kochergin and Foell 2006;Sakly et al 2006), chemical oxidation using HNO 3 (Leisenberger et al 1997), O 3 , H 2 O 2 (Frotscher et al 1996), vapor of pyridine (Mattei et al 2000), water solution of KNO 3 and alcohol (Salonen et al 1997a), and thermal oxidation in wet and dry O 2 fluxes (Unagami 1980;Maccagnani et al 1998;Kim et al 2001;Pap et al 2004Pap et al , 2005, including rapid thermal oxidation (Gelloz et al 2005). A data-review regarding a wide range of oxidation treatments (e.g., thermal treatments, electrochemical and chemical oxidation, photochemical oxidation, etc.)…”