We propose a novel self-assembly process to fabricate periodic arrays of β-FeSi 2 nanopillars for photonic applications. Selfassembled monolayers of polystyrene nanospheres (PSNSs) are coated with SiO 2 by oblique evaporation at a deposition angle of 70°. After the PSNSs are removed by annealing in air at 650 °C, periodic arrays of SiO 2 nanospherical crowns (NSCs) remain. On the NSC template, Si and Fe are deposited alternatively at a deposition angle of 80° and a substrate temperature of 470 °C. Due to the strong shadowing effect, non-close-packed nanopillar arrays of β-FeSi 2 are successfully fabricated. Periodic arrays of β-FeSi 2 are useful to manipulate thermal and/or solar radiation.