Application of focused ion beam system as a defect localization and root cause analysis tool

Ooi, CL; Siek, K.H.; Sim, K.S.

doi:10.1109/ipfa.2001.941466

Cited by 2 publications

(1 citation statement)

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“…FIB is also a useful tool for modification and investigation of tomographic surface in material science at micro and nano-level [10]. A precise cross sectional view of nanostructure can also be prepared by FIB and it is useful in medical analysis of bone and dental implant [11][12][13]. In addition to machining, FIB also is used to characterize microstructure using 3D orientation microscopy based on serial sectioning and electron backscattering diffraction [14,15].…”

Section: Introductionmentioning

confidence: 99%

Investigation of Microholes Produced by Focused Ion Beam Micromachining

Hajar

Ali

2011

AMR

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This paper discusses the microfabrication of microholes using focused ion beam and investigation of geometrical integrity of microholes. Different combination of aperture size, probe current, acceleration voltage was applied for micromachining and optimized based on taper angle. Microholes with 3.0 μm of diameter were milled according to the optimized parameter using bitmap mode. The depth range of microholes was 1.0-5.5 μm. The hole’s depth and taper angle were investigated for characterization. Each of the microholes was cross sectioned for investigation. A relationship of taper angle (θ), depth and aspect ratio were plotted. Low aspect ratio (less than 1) would give the lower taper angle and hence better integrity. Acceleration voltage of 25 kV, probe current of 41.5 pA and aperture size of 4 nm produced lower taper angle for different aspect ratio.

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