Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer

Shangqi, 匡尚奇 Kuang; Chao, 张超 Zhang; Yiming, 王一名 Wang; Xiangyan, 周祥燕 Zhou; Yao, 谢耀 Xie

doi:10.3788/ope.20172508.2046

光学精密工程

2017

DOI: 10.3788/ope.20172508.2046

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Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer

匡尚奇 Kuang Shangqi¹,

张超 Zhang Chao²,

王一名 Wang Yiming³

et al.

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Application of improved quantum evolutionary algorithm in design of broadband EUV multilayer

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