Application of spectroscopic ellipsometry-based scatterometry for ultrathin spacer structure

Chen, Ryan Chia-Jen; Chen, Fang-Cheng; Luo, Yingying; Perng, Baw-Ching; Chiu, Yu‐Jing; Tao, Hun-Jan

doi:10.1117/12.557248

Metrology, Inspection, and Process Control for Microlithography XVIII 2004

DOI: 10.1117/12.557248

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Application of spectroscopic ellipsometry-based scatterometry for ultrathin spacer structure

Ryan Chia-Jen Chen

Fang-Cheng Chen

Yingying Luo

et al.

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Application of spectroscopic ellipsometry-based scatterometry for ultrathin spacer structure

Cited by 2 publications

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