“…Additionally, the process of making such films can be quite complex. On the one hand, complexity arises from the synthesis of the POSS or spherosilicate precursor used for the deposition of the thin film, which often consists of multiple steps including purification/separation. ,− ,,,,,− On the other hand, the development of POSS or spherosilicate containing thin films often uses complex deposition procedures or uses more expensive methods such as physical vapor deposition. − ,,,,,,,,, In the previous work, we have presented the straightforward synthesis of the reactive spherosilicate that could provide a more direct approach to the development of functionalized hybrid thin films. By reacting dichlorodimethylsilane with the D4R oligomers of cyclosilicate hydrate crystals, [Si 8 O 12 ][OSi(CH 3 ) 2 Cl] 8 spherosilicate is obtained with high yield and high purity …”