2009
DOI: 10.1007/s11434-009-0339-4
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Applications of combinatorial approach to the investigation of optical functional materials

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“…The deposition equipment with a combinatorial masking strategy can be used to synthesize thin-film "spatially addressable" libraries. The masking strategy, including the choice of mask form and masking schemes, is the key to the art of making a thin-film library and determine the efficiency of library [13,19,20,[38][39][40]. Matsumoto and Ohsawa [27][28][29] demonstrated successful application of the combinatorial approach in the preparation of photocatalysts of [(SrTiO 3 ) 1 x (LaAlO 3 ) x ] (0<x<1) and Ti 1-x M x O 2 (M=transition metal) epitaxial thin film by a PLD system equipped with a movable mask.…”
Section: Synthesis Of Thin Filmsmentioning
confidence: 99%
“…The deposition equipment with a combinatorial masking strategy can be used to synthesize thin-film "spatially addressable" libraries. The masking strategy, including the choice of mask form and masking schemes, is the key to the art of making a thin-film library and determine the efficiency of library [13,19,20,[38][39][40]. Matsumoto and Ohsawa [27][28][29] demonstrated successful application of the combinatorial approach in the preparation of photocatalysts of [(SrTiO 3 ) 1 x (LaAlO 3 ) x ] (0<x<1) and Ti 1-x M x O 2 (M=transition metal) epitaxial thin film by a PLD system equipped with a movable mask.…”
Section: Synthesis Of Thin Filmsmentioning
confidence: 99%