2019
DOI: 10.18689/mjai-1000119
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Approaches for Sample Characterization and Lithography with Nanoparticles using Modes of Scanning Probe Microscopy

Abstract: Measurement and imaging modes of scanning probe microscopy (SPM) have been routinely applied for characterizing systems of nanoparticles; however the evolution of fabrication methods to prepare arrangements of nanoparticles remains a challenge. Reproducible fabrication of surface structures which integrate nanoparticles within ultra-small patterns will require innovative approaches to achieve high throughput and precision. Strategies for nanoscale lithography have been introduced for preparing defined arrangem… Show more

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