2018
DOI: 10.1364/optica.5.001046
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Are slot and sub-wavelength grating waveguides better than strip waveguides for sensing?

Abstract: The unique ability of slot and sub-wavelength grating (SWG) waveguides to confine light outside of the waveguide core material has attracted significant interest in their application to chemical and biological sensing. However, high sensitivity to sidewall roughness induced scattering loss in these structures compared to strip waveguides casts doubt on their efficacy. In this article, we seek to settle the controversy for silicon-oninsulator (SOI) photonic devices by quantitatively comparing the sensing perfor… Show more

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Cited by 127 publications
(121 citation statements)
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“…Importantly, the use of high-index dielectric materials that replace noble metals in plasmonics present a particular advantage from both cost and scalability perspectives, especially considering that anapoles and BIC are generally engineered in rather simple geometrical structures that can be integrated into an on-chip circuitry. The use of resonant structures may improve substantially both performance and efficiency of subwavelength integrated photonics actively discussed in the current literature [163,164].…”
Section: Discussionmentioning
confidence: 99%
“…Importantly, the use of high-index dielectric materials that replace noble metals in plasmonics present a particular advantage from both cost and scalability perspectives, especially considering that anapoles and BIC are generally engineered in rather simple geometrical structures that can be integrated into an on-chip circuitry. The use of resonant structures may improve substantially both performance and efficiency of subwavelength integrated photonics actively discussed in the current literature [163,164].…”
Section: Discussionmentioning
confidence: 99%
“…However, it is worth mentioning that the gap structures e.g. sub-wavelength grating (SWG) and narrow slot waveguide offer many folds of signal enhancement as compared to a strip or rib waveguide [23]. Si 3 N 4 strip waveguides used for our experiments are fabricated on a 200 mm silicon wafer containing a stack of 2.3 ± 0.1µm thick high-density plasma enhanced chemical vapor deposition (PECVD) silicon oxide SiO 2 and 220 nm thick PECVD Si 3 N 4 [24].…”
Section: Investigated Photonic Platforms and Fabrication Detailsmentioning
confidence: 99%
“…3) indicates that the smallest loss change measurable in our setup is 0.17 dB, corresponding to a CO 2 concentration of 330 ppm. According to the measured FOM, the optimal length [19,23] for our waveguide to sense present-day atmospheric levels of CO 2 , i.e. 400 ppm, is 9 mm.…”
mentioning
confidence: 99%