Arrays of Microplasma Jets Generated by Double Parabolic Microcavities in an Hourglass Configuration

Cho, J. H.; Kim, M. H.; Park, S.-J; Eden, J. G.

doi:10.1109/tps.2011.2165856

Cited by 8 publications

(3 citation statements)

References 2 publications

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“…Atmospheric pressure plasmas have been actively explored in fields ranging from microstructure to large-scale applications because of their wide potential as reactive plasmas [1][2][3][4][5][6]. In the past, most studies have focused on the development and optimization of the plasma to enhance the production yield of chemical species for specific utilizations or on empirically discovering new phenomena through parametric studies and direct characterization of the plasma [7][8][9][10].…”

Section: Introductionmentioning

confidence: 99%

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Park

Choe

Kim

et al. 2015

Plasma Sources Sci. Technol.

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Electron diagnostics based on electron-neutral atom (e-a) bremsstrahlung in the UV and visible range emitted from atmospheric pressure plasmas is presented. Since the spectral emissivity of the e-a bremsstrahlung is determined by electron density (n e) and mean electron temperature (T e) representing the Maxwellian electron energy distribution, their diagnostics is possible. As an example, emission spectra measured from capacitive discharges are presented, which show good agreement with the theoretically calculated emissivity of the e-a bremsstrahlung. For a single pin electrode nanosecond-pulsed plasma jet (n-PPJ) in argon, we investigate the electron properties and the temporal behavior of the positive streamers. Streamers with many branches are clearly observed inside the dielectric tube, while a few main streamers propagate outside the tube along the jet axis. A two-dimensional (2D) measurement of the time-averaged T e distribution was developed using a commercial digital camera and optical band pass filters based on the emissivity ratio of two wavelengths of the e-a bremsstrahlung. The viable measurement range of T e is 0.5-7 eV for the choice of two wavelengths of 300s and 900s nm and 0.5-4 eV for two wavelengths of 400s and 900s nm, which are uncontaminated by the atomic and/or molecular spectra. The 2D T e distribution obtained using 514.5 and 632.8 nm emissions helps to reveal the role of electrons in streamer characteristics in the argon n-PPJ. Time-averaged T e of 2.0 eV and 1.0 eV inside and outside the tube, respectively, were measured. The streamer dynamics of the n-PPJ is shown to be dependent on T e .

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Section: Introductionmentioning

confidence: 99%

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Park

Choe

Kim

et al. 2015

Plasma Sources Sci. Technol.

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“…Various bio‐compatible APNTP sources have been developed in laboratories all around the world. Commonly reported are single jets, bundles of single jets, which are either individually ballasted, or share common electrodes with the same ballast . Also, there are reports of plasma brushes with the usual circular opening of the gas channel being replaced by a thin slot .…”

Section: Introductionmentioning

confidence: 99%

Plasma Thorns: Atmospheric Pressure Non‐Thermal Plasma Source for Dentistry Applications

Liang

Sun

et al. 2015

Plasma Processes & Polymers

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A novel atmospheric pressure, non-thermal plasma source -plasma thorns, can simultaneously generate plasma plumes toward multiple preset directions. This plasma source is proposed here for the sterilization of the inner surfaces of tubular structures. Compared with the highly directional plasma jets or jet arrays, the plasma thorns provides significantly higher antimicrobial efficacy in the radial directions. After treatment with plasma thorns of the root canal biofilm, a significant decrease in the number of CFUs was observed. It is possible to reduce the size of the device to even micrometer scale, which opens doors to many potential applications, such as the treatment of multiple internal cavities or complex hollow structures.

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“…Many progresses have been observed in the application of microplasma direct etching of material due to the merits of maskless, high efficiency and low cost. Different configurations have been studied for microplasma material etching so far, such as microplasma jets [9][10][11] and microcavity discharge plasmas [12][13][14], et al. However, these devices can only achieve etching resolution of tens to a few hundred micrometers, which can not satisfy the requirements In this paper, we propose a novel maskless sub-micro or nanoscale plasma etching method based on microplasma reactor array.…”

Section: Introductionmentioning

confidence: 99%

Fabrication and operation of microplasma reactor array for maskless nanoscale material etching

Xie

Wen

Wang

et al. 2013

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

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This paper reports a novel maskless nanoscale material etching method based on microplasma reactor array with advantages of high etching efficiency, high fidelity, simple-structure, and flexible to etching various material. A 2×2 inverted pyramidal microplasma reactor array with each cavity dimension of 50μm was successfully fabricated by MEMS process. Experiment results showed that the devices could operate in rare gas Ar under dc excitation. V-I characteristics of the microplasma reactor array at 10kpa of Ar with different ballast resistances were presented. The work in this paper may lay a good foundation for maskless nanoscale material etching.

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Arrays of Microplasma Jets Generated by Double Parabolic Microcavities in an Hourglass Configuration

Cited by 8 publications

References 2 publications

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Continuum emission-based electron diagnostics for atmospheric pressure plasmas and characteristics of nanosecond-pulsed argon plasma jets

Plasma Thorns: Atmospheric Pressure Non‐Thermal Plasma Source for Dentistry Applications

Fabrication and operation of microplasma reactor array for maskless nanoscale material etching

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