2023
DOI: 10.1039/d3dt01204b
|View full text |Cite
|
Sign up to set email alerts
|

Atmospheric-pressure atomic layer deposition: recent applications and new emerging applications in high-porosity/3D materials

M. Chen,
M. P. Nijboer,
A. Y. Kovalgin
et al.

Abstract: Atomic layer deposition (ALD) is a widely recognized technique for depositing ultrathin conformal films with excellent thickness control at Ångström or (sub)monolayer level. Atmospheric-pressure ALD is an upcoming ALD process...

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2023
2023
2025
2025

Publication Types

Select...
5
1

Relationship

0
6

Authors

Journals

citations
Cited by 9 publications
(1 citation statement)
references
References 145 publications
0
1
0
Order By: Relevance
“…However, technical advances in recent years suggest that the impact of these negative factors can be reduced. In particular, we should note the development of technically simpler technologies such as atmospheric pressure ALD [142,143] and faster roll-to-roll ALD, spatial ALD [19], as well as the emergence of techniques that avoid the use of plasma to produce silver [123,144]. We believe that the advancement of these technologies could greatly augment the likelihood of extensive application of ALD in the manufacturing of antibacterial-coated materials within the industry.…”
Section: Advantages Disadvantages and Perspectives Of Aldmentioning
confidence: 99%
“…However, technical advances in recent years suggest that the impact of these negative factors can be reduced. In particular, we should note the development of technically simpler technologies such as atmospheric pressure ALD [142,143] and faster roll-to-roll ALD, spatial ALD [19], as well as the emergence of techniques that avoid the use of plasma to produce silver [123,144]. We believe that the advancement of these technologies could greatly augment the likelihood of extensive application of ALD in the manufacturing of antibacterial-coated materials within the industry.…”
Section: Advantages Disadvantages and Perspectives Of Aldmentioning
confidence: 99%